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ISO 14644

ESD control in a cleanroom: how do you meet both requirements at once?

In a cleanroom, particle cleanliness and ESD control must be right at the same time. That demands low-outgassing, particle-free and yet dissipative materials. Because grounding options are limited and many surfaces are insulating, ionisation becomes central. This guide covers materials, garments, ionisation and the classes per ISO 14644-1.

5 minStand: 2026-07Geprüft: ESD specialists
View cleanroom ESD
two goals
cleanliness and ESD together
low-outgassing
particle-free materials
ionisation
where grounding is missing
ISO 14644-1
cleanroom classes
Inhalt
  1. Requirements
  2. Materials and garments
  3. Ionisation and records
  4. Frequently asked questions

Why must cleanroom and ESD be met together?

A cleanroom follows two rule sets at once: particle cleanliness to ISO 14644‑1 and ESD control to IEC 61340‑5‑1. A material must not trade one against the other - it has to be low-outgassing and particle-free and at the same time dissipative. Solutions that meet only one goal are ruled out.

The classic conflict: standard rubber mats and many soft plastics outgas and shed particles - not allowed in a cleanroom, even though they would be dissipative. Conversely, many cleanroom-compatible surfaces are insulating and build up charge. So you choose materials that are explicitly specified and documented for both requirements.

RequirementCleanroom-compatible ESD solutionFeature
Work surfacedissipative cleanroom laminate, not a rubber matlow-outgassing, particle-free, grounded
Flooringdissipative cleanroom floorno outgassing, defined resistance
Garmentscleanroom-compatible ESD coverallgrid fabric, particle-retaining
Insulating surfacesionisationneutralises where grounding does not reach

Which materials and garments are cleanroom-compatible?

Cleanroom-compatible ESD equipment is specified as low-outgassing and particle-free. Avoid standard rubber mats: they outgas and carry particles in. Instead use dissipative laminates, cleanroom floors and plastics released for the cleanroom - with a documented dissipation resistance.

For garments, ESD and cleanroom function work together: cleanroom-compatible ESD coveralls with a conductive fibre grid retain the wearer's particles and shield the charge at the same time. They are complemented by dissipative cleanroom gloves and ESD cleanroom shoes with a defined through-resistance.

EquipmentCleanroom-compatible ESD solutionPurpose
CoverallESD cleanroom coverall with grid fabricparticle retention and shielding
Glovesdissipative cleanroom gloveslow-particle, defined resistance
ShoesESD cleanroom shoes or overshoespersonnel dissipation via the floor
Matsno standard rubber, cleanroom laminateavoids outgassing and particles
Standard rubber mats do not belong in a cleanroom: they outgas and shed particles. Use only dissipative surfaces released for cleanroom use.

Why is ionisation so important in a cleanroom?

In a cleanroom the grounding options are limited and many surfaces stay insulating. Insulators cannot be drained - their charge can only be neutralised by ionisation. That is why ionisers here are not an add-on but often the only control for non-groundable surfaces.

All measures are documented to ISO 14644‑1 (cleanroom class) and IEC 61340‑5‑1 (ESD): material releases, measured dissipation resistances, ioniser checks (decay time, offset) and the periodic monitoring. The records prove that both requirements are met together over time.

ISO classParticlesTypical use
ISO 5very lowsemiconductor, sensitive assembly
ISO 6lowboard assembly
ISO 7mediumpre-assembly, packaging
ISO 8higherless critical areas
Air ionisation and static charge

How ionisers neutralise insulating surfaces.

Read guide
ESD clothing

Smocks and textiles with a conductive grid.

Read guide

Frequently asked questions

Why no standard rubber mats in a cleanroom?

Standard rubber mats outgas and shed particles. That breaks the particle cleanliness to ISO 14644‑1. Use dissipative laminates and floors released for cleanroom use instead.

Why is ionisation so important in a cleanroom?

Grounding options are limited and many surfaces are insulating. Insulators cannot be grounded - their charge can only be neutralised by ionisation.

Which standards apply together?

For cleanliness ISO 14644‑1 with the cleanroom classes applies, for ESD control IEC 61340‑5‑1. Both requirements must be met at the same time and documented.

ESD equipment for your cleanroom

Low-outgassing, dissipative materials, cleanroom-compatible garments and ionisation - for ISO 14644-1 and IEC 61340-5-1 from a single source.

Standard-compliant

ISO 14644-1 and IEC 61340-5-1 met together.

Reviewed

Content reviewed by ESD specialists.

Full range

Materials, garments and ionisation from one source.

Expert advice

Personal advice on cleanroom ESD.

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