Semicon SP Cupla
Cleanroom technology
The Nitto Kohki Semicon SP Cupla is a clean-room-rated quick-release coupling in stainless steel SUS304 with FKM or EPDM seals for semiconductor manufacturing and related high-purity processes. The extensive range of 72 types covers plugs (P-types) and sockets (S-types) in nominal sizes 1, 2, 3, 4, 6, and 8, each with G thread (F-suffix), NPT thread (NPT-suffix), and UNS thread (UNS-suffix). FKM seals (F-suffix) and EPDM seals (E-suffix) allow selection based on media compatibility.
SUS304 stainless steel - Corrosion resistant, suitable for ultrapure water (UPW), process gases, and humid clean-room environments
FKM and EPDM seals - FKM for fluorochemicals and synthetic media, EPDM for steam and polar solvents
Nominal sizes 1-8 - Six size steps, compatible with G, NPT, and UNS threads per size
Pressure-free disconnection - Coupling and uncoupling without residual pressure prevents particle contamination in clean rooms
| Seal | Thread | Type (plug) | Type (socket) | Nominal sizes |
|---|---|---|---|---|
| FKM | G | 1P-304-F to 8P-304-F | 1S-304-F to 8S-304-F | 1, 2, 3, 4, 6, 8 |
| FKM | NPT | 1P-304-NPT-F to 4P-304-NPT-F | 1S-304-NPT-F to 4S-304-NPT-F | 1, 2, 3, 4 |
| FKM | UNS | 1P-304-UNS-F / 2P-304-UNS-F | - | 1, 2 |
| EPDM | G | 1P-304-E to 8P-304-E | 1S-304-E to 8S-304-E | 1, 2, 3, 4, 6, 8 |
| EPDM | NPT | 1P-304-NPT-E / 2P-304-NPT-E | 1S-304-NPT-E / 2S-304-NPT-E | 1, 2 |
Typical applications: Process gas supply in wafer processing equipment (CMP, ALD, etch chambers), ultrapure water distribution (UPW) in fab environments, process gas panels in chip manufacturing, photolithography purge systems, analytical and high-purity laboratories, and pharmaceutical bioprocess equipment where stainless steel media contact and low-particle connections are required.
Technical data from the manufacturer catalogue
| Series | SEMICON CUPLA SP Type |
|---|---|
| Body material | Electropolished stainless steel (SUS304) (SP, SCS, SCY Type), Polytetrafluoroethylene (PTFE) (SCAL Type), Fluoropolymer resin (PFA) (SCF Type) |
| Seal material | Fluoro rubber (FKM), Ethylene-propylene rubber (EPDM), Perfluoroelastomer (P), Kalrez (KL), Fluoropolymer resin PTFE (TF) packing seal (SCY Type), FEP-covered fluoro rubber O-ring (SCF Type), Valve SCS Type: Fluoropolymer resin (Socket: PFA, Plug: PTFE except 1P and 2P of PFA), Valve SCY Type: Fluoropolymer resin (PTFE except 1S and 2S of PFA), Valve SCAL Type and SCF Type: Fluoropolymer resin (PFA) |
| Max working pressure | 0.2 MPa {2 kgf/cm2} |
| Working temperature | SP Type: Fluoro rubber (FKM): 0 °C to +50 °C | SP Type: Ethylene-propylene rubber (EPDM): 0 °C to +50 °C | SP Type: Perfluoroelastomer (P): 0 °C to +50 °C | SP Type: Kalrez (KL): 0 °C to +50 °C | SCS Type socket O-ring: Perfluoroelastomer (P): 0 °C to +50 °C | SCY Type packing seal: Perfluoroelastomer (P): 0 °C to +50 °C | SCAL Type socket O-ring: Perfluoroelastomer (P): +5 °C to +50 °C | SCF Type O-ring: FEP-covered fluoro rubber (mark: -): +5 °C to +50 °C |
| Valve structure | Two-way shut-off (SCAL Type: Two-way shut-off with Spill Reduction) |
| Applicable fluids | High purity chemicals, Water, Gas, Air |
| Size range | SP and SCS Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT, 19/32-18UNS. SCY Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT. SCAL Type: 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch. SCF Type: thread 3/8 inch, 1/2 inch / M26, M32 and tube barb ø6 mm x ø8 mm, ø8 mm x ø10 mm |
| Catalogue page | C01en-b, 143 |
Operating principle
- SP Type: General purpose type with stainless steel body and rubber seal. Electro-polished body for enhanced corrosion resistance.
- SP Type: Body and valve springs are stainless steel (SUS304). Body is electro-polished for enhanced corrosion resistance.
- SP Type: Seal materials can be selected to suit your fluid and application, to flexibly comply with your semiconductor production process requirements.
- SP Type: All components are cleaned, assembled, inspected, and then packed in a clean room.
- SP Type: Grease free. No grease is applied to the seal material.
- SP Type: Each plug comes with a dust cap.
- SP Type: Stainless steel SUS316 body and valve springs are available as made-to-order products.
- SCS Type: Adopted stainless steel body and fluorine contained resin valves.
All models of the series
SP-P - Female thread
| Model | Coupling part | Application | Stainless steel (g) | L | C | T | øH(WAF) |
|---|---|---|---|---|---|---|---|
| 1P-304 | Plug | For 10L to 20L | 19 | 29 | 19 | Rc 1/8 | Hex.14 |
| 1P-304-NPT | Plug | For 10L to 20L | 19 | 29 | 19 | 1/8-27NPT | Hex.14 |
| 1P-304-UNS | Plug | For 10L to 20L | 34 | 33 | 19 | 19/32-18UNS | Hex.21 |
| 2P-304 | Plug | For 10L to 20L | 35 | 36 | 22 | Rc 1/4 | Hex.17 |
| 2P-304-NPT | Plug | For 10L to 20L | 35 | 36 | 22 | 1/4-18NPT | Hex.17 |
| 2P-304-UNS | Plug | For 10L to 20L | 41 | 36 | 22 | 19/32-18UNS | Hex.21 |
| 3P-304 | Plug | For 100L to 200L | 60 | 40 | 25 | Rc 3/8 | Hex.21 |
| 4P-304 | Plug | For 100L to 200L | 115 | 44 | 28 | Rc 1/2 | Hex.29 |
| 6P-304 | Plug | For 100L to 200L | 216 | 52 | 36 | Rc 3/4 | Hex.35 |
| 8P-304 | Plug | For 100L to 200L | 352 | 62 | 40 | Rc 1 | Hex.41 |
SP-S - Female thread
| Model | Coupling part | Application | Stainless steel (g) | L | øD | T | øH(WAF) |
|---|---|---|---|---|---|---|---|
| 1S-304 | Socket | For 10L to 20L | 82 | 48 | 24 | Rc 1/8 | 14 |
| 1S-304-NPT | Socket | For 10L to 20L | 84 | 48 | 24 | 1/8-27NPT | 14 |
| 2S-304 | Socket | For 10L to 20L | 138 | 58 | 28 | Rc 1/4 | 19 |
| 2S-304-NPT | Socket | For 10L to 20L | 138 | 58 | 28 | 1/4-18NPT | 19 |
| 3S-304 | Socket | For 100L to 200L | 204 | 65 | 35 | Rc 3/8 | 21 |
| 4S-304 | Socket | For 100L to 200L | 424 | 72 | 45 | Rc 1/2 | 29 |
| 6S-304 | Socket | For 100L to 200L | 708 | 88 | 55 | Rc 3/4 | 35 |
| 8S-304 | Socket | For 100L to 200L | 1081 | 102 | 65 | Rc 1 | 41 |
SCS-P - Female thread
| Model | Coupling part | Application | Stainless steel (g) | L | C | T | øH(WAF) |
|---|---|---|---|---|---|---|---|
| SCS-1P | Plug | For 10L to 20L | 17 | 29 | 19 | Rc 1/8 | Hex.14 |
| SCS-1P-NPT | Plug | For 10L to 20L | 17 | 29 | 19 | 1/8-27NPT | Hex.14 |
| SCS-1P-UNS | Plug | For 10L to 20L | 34 | 33 | 19 | 19/32-18UNS | Hex.21 |
| SCS-2P | Plug | For 10L to 20L | 32 | 34 | 22 | Rc 1/4 | Hex.17 |
| SCS-2P-NPT | Plug | For 10L to 20L | 29 | 34 | 22 | 1/4-18NPT | Hex.17 |
| SCS-2P-UNS | Plug | For 10L to 20L | 41 | 36 | 22 | 19/32-18UNS | Hex.21 |
| SCS-3P | Plug | For 100L to 200L | 61 | 40 | 25 | Rc 3/8 | Hex.21 |
| SCS-4P | Plug | For 100L to 200L | 114 | 44 | 28 | Rc 1/2 | Hex.29 |
| SCS-6P | Plug | For 100L to 200L | 198 | 52 | 36 | Rc 3/4 | Hex.35 |
| SCS-8P | Plug | For 100L to 200L | 338 | 62 | 40 | Rc 1 | Hex.41 |
SCS-S - Female thread
| Model | Coupling part | Application | Stainless steel (g) | L | øD | T | øH(WAF) |
|---|---|---|---|---|---|---|---|
| SCS-1S-NPT | Socket | For 10L to 20L | 84 | 48 | 24 | 1/8-27NPT | 14 |
| SCS-2S-NPT | Socket | For 10L to 20L | 138 | 58 | 28 | 1/4-18NPT | 19 |
SCY - Female thread
| Model | Coupling part | Application | Stainless steel (g) | L | øD | T | øH(WAF) |
|---|---|---|---|---|---|---|---|
| SCY-1S | Socket | For 10L to 20L | 116 | (48) | 29 | Rc 1/8 | 18 |
| SCY-1S-NPT | Socket | For 10L to 20L | 116 | (48) | 29 | 1/8-27NPT | 18 |
| SCY-2S | Socket | For 10L to 20L | 180 | (58) | 33 | Rc 1/4 | 22 |
| SCY-2S-NPT | Socket | For 10L to 20L | 180 | (58) | 33 | 1/4-18NPT | 22 |
| SCY-3S | Socket | For 100L to 200L | 292 | (65) | 39 | Rc 3/8 | 27 |
| SCY-4S | Socket | For 100L to 200L | 519 | (72) | 50 | Rc 1/2 | 35 |
| SCY-6S | Socket | For 100L to 200L | 862 | (88) | 59 | Rc 3/4 | 41 |
| SCY-8S | Socket | For 100L to 200L | 1360 | (102) | 68 | Rc 1 | 50 |
SCAL-P - Female thread
| Model | Coupling part | Application | Plastic (g) | L | øD | C | T | øH(WAF) |
|---|---|---|---|---|---|---|---|---|
| SCAL-2P | Plug | - | 37 | 50 | 27.5 | 24 | Rc 1/4 | 24 |
| SCAL-3P | Plug | - | 73 | 63 | 34.5 | 28 | Rc 3/8 | 30 |
| SCAL-4P | Plug | - | 107 | 72 | 39.5 | 30.5 | Rc 1/2 | 36 |
| SCAL-6P | Plug | - | 153 | 77 | 48 | 36.5 | Rc 3/4 | 41 |
SCAL-S - Female thread
| Model | Coupling part | Application | Plastic (g) | L | øD | T | øH(WAF) |
|---|---|---|---|---|---|---|---|
| SCAL-2S | Socket | - | 97 | (60.5) | 40.5 | Rc 1/4 | 27 |
| SCAL-3S | Socket | - | 135 | (69.5) | 47 | Rc 3/8 | 32 |
| SCAL-4S | Socket | - | 177 | (76) | 52 | Rc 1/2 | 36 |
| SCAL-6S | Socket | - | 339 | (90) | 65 | Rc 3/4 | 46 |
SCF-P-CONT - For container connection
| Model | Coupling part | Application | Plastic (g) | L | C | T | øD(WAF) |
|---|---|---|---|---|---|---|---|
| SCF-2P-M26 | Plug | For 10L to 20L | 33 | (53.7) | (31.2) | M26x1.5 | Hex.30 x ø32.5 |
| SCF-3P-M32 | Plug | For 10L to 20L | 50 | (57.7) | (35.2) | M32x1.5 | Hex.36 x ø39 |
SCF-S-TUBE - For tube connection
| Model | Coupling part | Application | Plastic (g) | L | øD | øE |
|---|---|---|---|---|---|---|
| SCF-2SL-N08 | Socket | For 10L to 20L | 76 | 77 | 33 | (45) |
| SCF-3SL-N10 | Socket | For 10L to 20L | 116 | 85 | 39 | (51) |
SCF-P - Female thread
| Model | Coupling part | Application | Plastic (g) | L | øD | C | T | øB | øA(WAF) | øH(WAF) |
|---|---|---|---|---|---|---|---|---|---|---|
| SCF-2P-3 | Plug | - | 53 | (67.2) | 32.5 | (31.2) | Rc 3/8 | 27 | 24 | Hex.30 |
| SCF-3P-4 | Plug | - | 79 | (71.2) | 39 | (35.2) | Rc 1/2 | 33 | 30 | Hex.36 |
SCF-S - Female thread (Straight type)
| Model | Coupling part | Application | Plastic (g) | L | øD | A | T | øE | øH(WAF) |
|---|---|---|---|---|---|---|---|---|---|
| SCF-2S-3 | Socket | - | 83 | (92) | 33 | 27 | Rc 3/8 | (45) | 24 |
| SCF-3S-4 | Socket | - | 124 | (102.5) | 39 | 33 | Rc 1/2 | (51) | 30 |
Dimensions in millimetres. Values in brackets apply in the connected condition.
Legend: L = overall length; H = width across flats or outside dimension; D = socket outside diameter; A = hose barb length; C = sleeve dimension; T = thread or barb size; B = bore
Series comparison
| Series | Max working pressure | Size range | Valve structure | Applicable fluids |
|---|---|---|---|---|
| SEMICON CUPLA SCT Type | 2 bar | SCT Type: 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/4-18NPT, 3/8-18NPT, 1/2-14NPT, 3/4-14NPT, 1-11.5NPT. SCY Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT | Two-way shut-off | High purity chemicals, Water, Gas, Air |
| SEMICON CUPLA SP Type | 2 bar | SP and SCS Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT, 19/32-18UNS. SCY Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT. SCAL Type: 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch. SCF Type: thread 3/8 inch, 1/2 inch / M26, M32 and tube barb ø6 mm x ø8 mm, ø8 mm x ø10 mm | Two-way shut-off (SCAL Type: Two-way shut-off with Spill Reduction) | High purity chemicals, Water, Gas, Air |
SEMICON CUPLA SP Type and SCT Type share the same 0.2 MPa {2 kgf/cm2} rating and the same two-way shut-off, so pressure class and valve type do not separate them. Choose SP Type when the line calls for an electropolished stainless steel (SUS304) body with a rubber seal that can be specified as FKM, EPDM, perfluoroelastomer (P) or Kalrez (KL) to match the chemical, and for the size range from 1/8 inch to 1 inch including 1/8-27NPT, 1/4-18NPT and 19/32-18UNS. The working temperature range of 0 deg C to +50 deg C applies.
Body and seal materials
| Body material |
|---|
| Electropolished stainless steel (SUS304) (SP, SCS, SCY Type) |
| Polytetrafluoroethylene (PTFE) (SCAL Type) |
| Fluoropolymer resin (PFA) (SCF Type) |
| Seal material | Mark | Working temperature | Remarks |
|---|---|---|---|
| SP Type: Fluoro rubber (FKM) | - | 0 °C to +50 °C | - |
| SP Type: Ethylene-propylene rubber (EPDM) | - | 0 °C to +50 °C | - |
| SP Type: Perfluoroelastomer (P) | - | 0 °C to +50 °C | - |
| SP Type: Kalrez (KL) | - | 0 °C to +50 °C | - |
| SCS Type socket O-ring: Perfluoroelastomer (P) | - | 0 °C to +50 °C | - |
| SCY Type packing seal: Perfluoroelastomer (P) | - | 0 °C to +50 °C | - |
| SCAL Type socket O-ring: Perfluoroelastomer (P) | - | +5 °C to +50 °C | - |
| SCF Type O-ring: FEP-covered fluoro rubber (mark: -) | - | +5 °C to +50 °C | - |
Further catalogue data
| Note | Value |
|---|---|
| Pressure units printed | MPa 0.2 / kgf/cm2 2 / bar 2 / PSI 29 |
| SP Type maximum tightening torque, Nm {kgf.cm} | Rc 1/8 and 1/8-27NPT: 9 {92}, Rc 1/4 and 1/4-18NPT: 14 {143}, 19/32-18UNS: 20 {204}, Rc 3/8: 22 {224}, Rc 1/2: 60 {612}, Rc 3/4: 90 {918}, Rc 1: 120 {1224} |
| SCS Type maximum tightening torque, Nm {kgf.cm} | Rc 1/8 and 1/8-27NPT: 9 {92}, Rc 1/4 and 1/4-18NPT: 14 {143}, 19/32-18UNS: 20 {204}, Rc 3/8: 22 {224}, Rc 1/2: 60 {612}, Rc 3/4: 90 {918}, Rc 1: 120 {1224} |
| SCY Type maximum tightening torque | See page 144 of SEMICON CUPLA SCS Type. |
| SCAL Type maximum tightening amount (approximate) | With seal tape wrapped on the male thread, screw it firmly by hand, and then add more tightening with a wrench as shown below: 1 3/4 to 2 turns for 1/4 inch, 3/8 inch, 1/2 inch and 3/4 inch size. |
| SP Type minimum cross-sectional area (mm2) | 1SP: 13, 2SP: 17, 3SP: 48, 4SP: 64, 6SP: 83, 8SP: 192 |
| SCS Type minimum cross-sectional area (mm2) | SCS-1SP: 15, SCS-2SP: 23, SCS-3P: 28, SCS-4P: 71, SCS-6P: 110, SCS-8P: 162 |
| SCY Type minimum cross-sectional area (mm2) | SCY-1S: 15, SCY-2S: 23, SCY-3S: 28, SCY-4S: 71, SCY-6S: 110, SCY-8S: 162 |
| SCAL Type minimum cross-sectional area (mm2) | SCAL-2S x SCAL-2P: 24, SCAL-3S x SCAL-3P: 41, SCAL-4S x SCAL-4P: 59, SCAL-6S x SCAL-6P: 108 |
| SCF Type minimum cross-sectional area (mm2) | SCF-2SP: 23.8, SCF-3SP: 44.2 |
| SCAL Type volume of spillage per disconnection (mL) | SCAL-2S x SCAL-2P: 0.07, SCAL-3S x SCAL-3P: 0.09, SCAL-4S x SCAL-4P: 0.13, SCAL-6S x SCAL-6P: 0.20. Volume of spillage may vary depending upon the usage conditions. |
| Interchangeability Check List (SCS Type, SCY Type) | A matrix of SCS Type plugs -1P to -8P against SCS Type sockets -1S, -2S and SCY Type sockets -1S, -2S, -3S, -4S, -6S, -8S indicates connection capability except for made-to-order products. |
| SCAL Type made-to-order item | Flange type |
| SCF Type reference diagram | The thread dimensions of container side for the plug are given for SCF-2P-M26 (M26x1.5) and SCF-3P-M32 (M32x1.5). For tolerance and other specific dimensions, consult us. |
| WAF | WAF stands for width across flats. |
| Flow rate | Flow Rate - Pressure Loss Characteristics charts are given per type: SP Type 1S-304 x 1P-304, 2S-304 x 2P-304, 3S-304 x 3P-304, 4S-304 x 4P-304, 6S-304 x 6P-304, 8S-304 x 8P-304 (1 to 1000 L/min, 0.001 {0.01} to 1.0 {10} MPa {kgf/cm2}); SCS Type SCY-1S x SCS-1P, SCS-1S x SCS-1P, SCY-2S x SCS-2P, SCS-2S x SCS-2P, SCY-3S x SCS-3P, SCY-4S x SCS-4P, SCY-6S x SCS-6P, SCY-8S x SCS-8P; SCY Type SCY-1S x SCS-1P to SCY-8S x SCS-8P; SCAL Type SCAL-2S x SCAL-2P to SCAL-6S x SCAL-6P; SCF Type SCF-2S-3 x SCF-2P-3, SCF-2SL-N08 x SCF-2P-3, SCF-3S-4 x SCF-3P-4, SCF-3SL-N10 x SCF-3P-4. [Test conditions] - Fluid : Water - Temperature : 23 deg C +/-5 deg C |
Interchangeability and size groups
SP Type: Sockets and plugs can be connected regardless of end configurations if the first number in the model name is the same. SCS Type: Sockets and plugs can be connected regardless of end configurations if the number [] in the model name {SCS-[]S (P)} is the same; the plugs can be connected with sockets of SCY Type of the same size, see the Interchangeability Check List for details. SCY Type: Can be connected with plugs of SCS Type of the same size. SCAL Type: Sockets and plugs can be connected regardless of end configurations if the number [] in the model name {SCAL-[]S (P)} is the same. SCF Type: Sockets and plugs can be connected regardless of end configurations if the number [] in the model name {SCF-[]S (P)} is the same.
Safety and application notes
- SCAL Type: Whichever method, overtightening may damage the thread and cause leakage, so take extra care.
- SCAL Type: Excessive tightening will damage the threaded part and result in leakage.
- SCAL Type: Note: A very small amount of gas can permeate polytetrafluoroethylene (PTFE) bellows in the socket.
- Before use, please be sure to read "Safety Guide" described at the end of this book and "Instruction Sheet" that comes with the products.
All technical data on this page is taken from the Nitto Kohki general catalogue Quick Connect Couplings C01en-b, page 143. The complete catalogue is available for download on this page.
