Cleanroom technology
Nitto Kohki Pneumatic Solutions
Nitto Kohki clean-room couplings are designed for semiconductor and chip manufacturing, where particulate release and contamination are critical rejection criteria. The range covers two specialised series: the Semicon SP Cupla in stainless steel SUS304 with FKM or EPDM seals, and the Semicon SCT Cupla in PTFE and FEP, which allows chemically inert media contact. Both series connect and disconnect pressure-free, preventing fluid or gas release during coupling.
Semicon SP CuplaStainless steel SUS304, FKM/EPDM, G and NPT connection
Semicon SCT CuplaPTFE/FEP body, chemically inert, for aggressive media
| Feature | Semicon SP | Semicon SCT |
|---|---|---|
| Body material | Stainless steel SUS304 | PTFE, FEP |
| Seal | FKM or EPDM | FEP |
| Thread types | G, NPT, UNS | G, NPT |
| Sizes (nominal) | 1-8 | 2-8 |
| Chemical resistance | High (SUS) | Very high (PTFE/FEP) |
Typical applications: Semiconductor manufacturing (wafer handling, CMP, etch processes), chip test equipment and wafer stepper systems, gas panels and gas dosing systems in chip production, ultrapure water (UPW) circuits, and laboratory systems in pharmaceutical and biotech industries requiring particle-free connections.
Series in this category compared
Maximum working pressure is the first selection criterion. It decides the series, not the size: a low pressure coupling does not become high pressure capable by choosing a larger bore.
| Series | Max working pressure | Sizes | Shut-off type | Fluids | Body material | Catalogue page |
|---|---|---|---|---|---|---|
| SEMICON CUPLA SCT Type | 2 bar | SCT Type: 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/4-18NPT, 3/8-18NPT, 1/2-14NPT, 3/4-14NPT, 1-11.5NPT. SCY Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT | Two-way shut-off | High purity chemicals, Water, Gas, Air | Polytetrafluoroethylene (PTFE) (SCT Type), Electropolished stainless steel (SUS304) (SCY Type) | 145 |
| SEMICON CUPLA SP Type | 2 bar | SP and SCS Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT, 19/32-18UNS. SCY Type: 1/8 inch, 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch, 1 inch / 1/8-27NPT, 1/4-18NPT. SCAL Type: 1/4 inch, 3/8 inch, 1/2 inch, 3/4 inch. SCF Type: thread 3/8 inch, 1/2 inch / M26, M32 and tube barb ø6 mm x ø8 mm, ø8 mm x ø10 mm | Two-way shut-off (SCAL Type: Two-way shut-off with Spill Reduction) | High purity chemicals, Water, Gas, Air | Electropolished stainless steel (SUS304) (SP, SCS, SCY Type), Polytetrafluoroethylene (PTFE) (SCAL Type), Fluoropolymer resin (PFA) (SCF Type) | 143 |
The four shut-off types
The shut-off type decides what happens on disconnection. It is the second criterion and depends on whether the line is under pressure when it is parted and how much fluid may escape.
Choosing a coupling in five steps
- Fix the fluid and the operating temperature, which gives the seal material.
- Determine the maximum working pressure, which gives the pressure class and the series.
- Choose the shut-off type: one-way, two-way, valveless or flat face.
- Fix the end connection and size: hose barb, male thread, female thread or tube fitter.
- Choose the body material for the fluid and the environment, then order plug and socket as a pair.
This page is based on the Nitto Kohki general catalogue Quick Connect Couplings C01en-b, 190 pages. The complete catalogue is available for download on this page.
